Interference Confocal Microscope Integrated with Spatial Phase Shifter
نویسندگان
چکیده
منابع مشابه
Interference Confocal Microscope Integrated with Spatial Phase Shifter
We present an interference confocal microscope (ICM) with a new single-body four-step simultaneous phase-shifter device designed to obtain high immunity to vibration. The proposed ICM combines the respective advantages of simultaneous phase shifting interferometry and bipolar differential confocal microscopy to obtain high axis resolution, large dynamic range, and reduce the sensitivity to vibr...
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ژورنال
عنوان ژورنال: Sensors
سال: 2016
ISSN: 1424-8220
DOI: 10.3390/s16091358